Thinned Backside Illuminated CCDs For Ultraviolet Imaging

• 16 August 1988
• proceedings article
• Published by SPIE-Intl Soc Optical Eng
• Vol. 0932, 305
• https://doi.org/10.1117/12.946905

Abstract

Keywords

• SENSORS
• ANNEALING
• LASERS
• SILICON
• ABSORPTION
• CHEMICALS