A packaged silicon MEMS vibratory gyroscope for microspacecraft

Open Access

Publisher Website

22 November 2002

proceedings article
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 500-505
https://doi.org/10.1109/memsys.1997.581911

Abstract

No abstract available

This publication has 1 reference indexed in Scilit:

Silicon bulk micromachined vibratory gyroscope for microspacecraft
Published by SPIE-Intl Soc Optical Eng ,1996