Enhancement Of The Reflectivity Of Multilayer X-Ray Mirrors By Ion Polishing
- 28 July 1989
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 271-279
- https://doi.org/10.1117/12.962651
Abstract
The performance of multilayer x-ray mirrors is improved by smoothing the boundaries within the multilayer stack with ion bombardment at grazing angles of incidence. The process is applied to Co-C and to RhRu-C mirrors for normal incidence telescopes at λ = 64 and λ = 114Å and the reflectivity is increased by a factor of two in both cases. Accumulation of roughness during deposition is eliminated.Keywords
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