In Situ Transmission Electronmicroscopic Study of Crystal Growth by Chemical Vapor Deposition

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Abstract
A gas-reaction chamber has been constructed, which allows the in situ transmission electronmicroscopic study of gas-solid reactions at temperatures up to 900 °–1000 °C. The morphological and crystallographic properties of iron, of iron and wüstite, and of magnetite depositing epitaxially on (111) gold substrates, either by the thermal decomposition of Fe(CO)5 or by decomposition and chemical reaction from Fe(CO)5–H2 or from Fe(CO)5–H2–H2O mixtures, are described. In other examples, the oxidation of the initially depositing iron is illustrated. In some of the experiments, polycrystalline iron foils were substituted for the (111) gold substrates, and a profound effect of iron deposition on the rate of grain growth in the iron foil was found. Coalescence of iron crystallites and high mobility of the deposit were observed. Incidental observations on the decomposition of Ni(CO)4 are described. These permit comparison of the epitaxial relationships in the Ni–Au and NiO–Au systems with those of the corresponding iron systems.

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