Imprints offer Moore
- 1 June 2002
- journal article
- Published by Springer Nature in Nature
- Vol. 417 (6891) , 802-803
- https://doi.org/10.1038/417802a
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Ultrafast and direct imprint of nanostructures in siliconNature, 2002
- SOFT LITHOGRAPHYAnnual Review of Materials Science, 1998
- Imprint Lithography with 25-Nanometer ResolutionScience, 1996