Epitaxial reordering of ion-irradiated NiSi2 layers
- 1 January 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 87 (3) , 277-284
- https://doi.org/10.1016/0040-6090(82)90364-9
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Metastable phases in laser-irradiated Pt-Si and Pd-Si thin filmsApplied Physics Letters, 1980
- Ion-beam-induced formation of the PdSi silicideApplied Physics Letters, 1979
- Channeling studies of radiation damage in metal-silicidesApplied Physics Letters, 1978
- Formation kinetics and structure of Pd2Si films on SiSolid-State Electronics, 1973
- The growth and transformation of Pd2Si on (111), (110) and (100) SiThin Solid Films, 1973