Structural study of the diamond phase carbon films produced by ionized deposition

Publisher Website
Google Scholar
Abstract
Diamond phase carbon films have been prepared with the aid of an ionized deposition technique. The structures of these films were examined by transmis- sion electron microscopy and transmission electron diffraction. It was found that the crystal structure of these films depends strongly on the deposition conditions, especially on the substrate potential. For a negatively biased substrate potential, a film having a halo or diamond pattern was obtained, while the graphite patterns were observed for a positively biased potential. These structures were confirmed by directly comparing them with those of diamond or graphite powder. The observed average grain size of the diamond film was several hundred angstroms and was much smaller than that of graphite. Finally, we discuss the formation process of diamond phase carbon films.

This publication has 0 references indexed in Scilit: