Integrated Optic Devices in Silicon and Silicon-on-Insulator Materials
- 1 January 1997
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
This paper reviews various integrated optics techniques and devices in the silicon material system. Different approaches for waveguides, passive and active components in silicon and the performance of such devices will be discussed.Keywords
This publication has 30 references indexed in Scilit:
- 0.1 dB/cm waveguide losses in single-mode SOI rib waveguidesIEEE Photonics Technology Letters, 1996
- Integrated optics in silicon and SiGe-heterostructuresJournal of Lightwave Technology, 1996
- Silicon-on-insulator optical rib waveguides: loss, mode characteristics, bends and y-junctionsIEE Proceedings - Optoelectronics, 1994
- Low loss single-mode optical waveguides with large cross-section in standard epitaxial siliconIEEE Photonics Technology Letters, 1994
- Hybrid integration of semiconductor lasers with Si-based single-mode ridge waveguidesJournal of Lightwave Technology, 1992
- Low loss singlemode optical waveguides with large cross-section in silicon-on-insulatorElectronics Letters, 1991
- Passive coupling of InGaAsP/InP laser array and singlemode fibres using silicon waferboardElectronics Letters, 1991
- Large single-mode rib waveguides in GeSi-Si and Si-on-SiO/sub 2/IEEE Journal of Quantum Electronics, 1991
- Optical waveguides in oxygen-implanted buried-oxide silicon-on-insulator structuresOptics Letters, 1988
- All-silicon active and passive guided-wave components for λ = 1.3 and 1.6 µmIEEE Journal of Quantum Electronics, 1986