Preparation and electrical conductivity of LISICON thin films

• 1 February 1983
• journal article
• Published by Elsevier in Solid State Ionics
• Vol. 8  (1) , 43-48
• https://doi.org/10.1016/0167-2738(83)90038-3

Abstract

Keywords

• HEAT TREATMENT
• FILMS LISICON
• LI3ZN0.5GEO4
• SPUTTERING
• LISICON THIN FILMS
• TARGET COMPOSITION