Influence of Laser Fluence on Structural and Ferroelectric Properties of Lead-Zirconate-Titanate Thin Films Prepared by Laser Ablation

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Abstract
Ferroelectric lead-zirconate-titanate (PZT) thin films were deposited by excimer laser ablation on (100) MgO substrates with and without an electrode. The film composition was approximately the same as that of the target over a laser fluence range of 2.6 and 10 J/cm2·shot. Increase in the laser fluence enhances the film deposition rate and the crystallite size. In representative experiments, the remanent polarization and coercive field of the film prepared at a laser fluence of 9.2 J/cm2·shot were 28 µC/cm2 and 72 kV/cm, respectively.