Accuracy of Surface Acoustic Wave Velocity Measured to Determine the Elastic Constants on LiTaO3 Substrate

Abstract
Elastic constants can be determined from the experimental values of surface acoustic wave (SAW) velocities. In this paper, the measurement accuracy of SAW velocities is numerically obtained to determine elastic constants and their temperature coefficients. The velocities must be measured with an accuracy of more than 0.001 m/s and the temperature characteristics of more than 0.0001 ppm/°C.

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