Preparation of Standards for Thin Film Thickness Measurements by Energy Dispersive X-ray Analysis
- 1 May 1981
- journal article
- research article
- Published by SAGE Publications in Applied Spectroscopy
- Vol. 35 (3) , 324-328
- https://doi.org/10.1366/0003702814732689
Abstract
Thin film measurements by energy dispersive x-ray analysis require appropriate standards. A method for preparing such standards by deposition of thin films and direct measurements of their thickness with a scanning electron microscope is described. These standards have been used to measure thickness of corrosion layers to within ±8.0 nm accuracy.Keywords
This publication has 1 reference indexed in Scilit:
- Vapor DepositionJournal of the Electrochemical Society, 1966