Chemical mechanical polishing of polymer films
- 1 October 1998
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 27 (10) , 1088-1094
- https://doi.org/10.1007/s11664-998-0142-z
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The Role of Abrasion in the Optical Polishing of Metals and GlassPublished by Optica Publishing Group ,1984
- Observations on Glass PolishingPublished by Optica Publishing Group ,1982
- Contact and Rubbing of Flat SurfacesJournal of Applied Physics, 1953