Operation of α(6H)-SiC pressure sensor at 500 °C
- 1 April 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 66 (1-3) , 200-204
- https://doi.org/10.1016/s0924-4247(98)00009-0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- High-voltage 6H-SiC p-n junction diodesApplied Physics Letters, 1991
- Semiconductor Strain TransducersBell System Technical Journal, 1960
- Deformation and fracture of small silicon crystalsActa Metallurgica, 1957