LIGA micropump for gases and liquids
- 31 January 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 40 (1) , 57-61
- https://doi.org/10.1016/0924-4247(94)85030-5
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- 3.5 mu m thin valves in titanium membranesJournal of Micromechanics and Microengineering, 1992
- A study of a high-pressure micropump for integrated chemical analysing systemsSensors and Actuators A: Physical, 1992
- A piezoelectric micropump based on micromachining of siliconSensors and Actuators, 1988