Oxygen transport analysis in Czochralski silicon melt by considering the oxygen evaporation from the melt surface
- 1 February 1995
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 148 (1-2) , 70-78
- https://doi.org/10.1016/0022-0248(94)00655-5
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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