Photoemission investigation of Ge and SiGe alloy surfaces after reactive ion etching
- 1 November 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 6 (6) , 1650-1656
- https://doi.org/10.1116/1.584424
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: