Very Long and Large-Area RF Plasma Productions by Odd Surface Waves for Online Mass Production of Amorphous Silicon Solar Cells or Mirrors

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Abstract
Very long and large-area plasmas are confirmed to be produced by means of RF discharge between a pair of very long or large-area electrodes. The electrodes are separated from plasma by dielectric layers. The length of long plasma is 11 m in the case of using a long cylindrical dielectric tube with 28 mmφ. The area and thickness of large-area plasma are 73 cm× 176 cm and 2.5 cm, respectively, in the case of using a large-area rectangular dielectric tube. The plasmas are thought to be produced via interaction between two electromagnetic waves, odd metal surface wave ( MSW o ) and odd plasma surface wave ( PSW o ), propagating between electrodes.