Thermodynamic and Experimental Aspects of Gallium Arsenide Vapor Growth

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Abstract
The thermodynamics of the transport of by in an open system has been investigated theoretically and a new approach taken to determine the maximum possible amount of that can be deposited. The results of the calculations have been checked experimentally, using hydrogen and argon as a carrier gas, by measurements of the amount of withdrawn from the source and also of total amounts of deposited. We show that in the range of temperatures of practical interest the experimental results can be accounted for by a simple theoretical analysis assuming a single dominant equilibrium reaction. The theoretical work and the experimental measurements have led to an exact knowledge of the chemical compounds involved and have been used as a basis for a preliminary investigation of the growth mechanisms. The problem has been approached by measurements not only of the total amount of deposit but also of the rate of growth on a substrate in the presence of various temperature gradients. A kinetic limitation of the growth rate appears clearly.

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