Characterization of gear pumps fabricated by LIGA

• 23 July 1998
• journal article
• Published by Springer Nature in Microsystem Technologies
• Vol. 4  (4) , 163-167
• https://doi.org/10.1007/s005420050122

Abstract

Keywords

• PSI
• VACUUM
• FLOW
• GEAR PUMP
• H2O
• MAGNETICALLY
• PUMP AND A DIRECT DRIVE