Development of a 200 kV high current accelerator with post acceleration mass analysis for O+ implantation into silicon
- 1 January 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 21 (1-4) , 300-305
- https://doi.org/10.1016/0168-583x(87)90845-7
Abstract
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This publication has 1 reference indexed in Scilit:
- Currents Limited by Space Charge between Concentric SpheresPhysical Review B, 1924