Electronic color charts for dielectric films on silicon
- 5 April 2004
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 12 (7) , 1464-1469
- https://doi.org/10.1364/opex.12.001464
Abstract
This paper presents the calculation of the perceived color of dielectric films on silicon. A procedure is shown for computing the perceived color for an arbitrary light source, light incident angle, and film thickness. The calculated color is converted into RGB parameters that can be displayed on a color monitor, resulting in the generation of electronic color charts for dielectric films. This paper shows generated electronic color charts for both silicon dioxide and silicon nitride films on silicon.Keywords
This publication has 1 reference indexed in Scilit:
- Reflectance of thinly oxidized silicon at normal incidenceApplied Optics, 1979