Perfluoroelastomer and fluoroelastomer seals for semiconductor wafer processing equipment
- 1 July 2003
- journal article
- Published by Elsevier in Journal of Fluorine Chemistry
- Vol. 122 (1) , 113-119
- https://doi.org/10.1016/s0022-1139(03)00102-7
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Thermal stability and sealing performance of perfluoroelastomer seals as a function of crosslinking chemistryJournal of Vacuum Science & Technology A, 1999
- Chemistry of fluorocarbon elastomersProgress in Polymer Science, 1989