Chip scale integrated microresonator sensing systems
- 14 April 2009
- journal article
- review article
- Published by Wiley in Journal of Biophotonics
- Vol. 2 (4) , 212-226
- https://doi.org/10.1002/jbio.200910010
Abstract
Medicine, environmental monitoring, and security are application areas for miniaturized, portable sensing systems. The emerging integration of sensors with other components (electronic, photonic, fluidic) is moving sensing toward higher levels of portability through the realization of self‐contained chip scale sensing systems. Planar optical sensors, and in particular, microresonator sensors, are attractive components for chip scale integrated sensing systems because they are small, have high sensitivity, can be surface customized, and can be integrated singly or in arrays in a planar format with other components using conventional semiconductor fabrication technologies. This paper will focus on the progress and prospects for the integration of microresonator sensors at the chip scale with photonic input/output components and with sample preparation microfluidics, toward self‐contained, portable sensing systems.Keywords
This publication has 143 references indexed in Scilit:
- Sensitive optical biosensors for unlabeled targets: A reviewAnalytica Chimica Acta, 2008
- Integrated photonic glucose biosensor using a vertically coupled microring resonator in polymersOptics Communications, 2008
- On-Column Micro Gas Chromatography Detection with Capillary-Based Optical Ring ResonatorsAnalytical Chemistry, 2008
- Optical sensing systems for microfluidic devices: A reviewAnalytica Chimica Acta, 2007
- Optofluidic ring resonator based dye laserApplied Physics Letters, 2007
- Enhancing sensitivity of a whispering gallery mode biosensor by subwavelength confinementApplied Physics Letters, 2006
- Mapping the global extent of malaria in 2005Trends in Parasitology, 2006
- High-Finesse Laterally Coupled Single-Mode Benzocyclobutene Microring ResonatorsIEEE Photonics Technology Letters, 2004
- Very low threshold whispering-gallery-mode microsphere laserPhysical Review A, 1996
- The Infrared Absorption Spectrum of WaterAustralian Journal of Physics, 1982