Synthesis of Nd(FeTi)12 films by sputtering

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Abstract
Nd(FeTi)12 films have been synthesized by dc magnetron sputtering. The films have tetragonal ThMn12 crystal structure as confirmed by XRD and magnetic measurements. The lattice parameters are a=8.57 and c=4.801 Å. The degree of the ThMn12 phase formation and the texture of the films are found to be dependent on deposition parameters. The films can be aligned with the (001) basal plane in the film plane by suitable deposition conditions. Thus the films are textured so that the easy axis, which is the c‐axis, is perpendicular to the film plane. After nitrogenation, the tetragonal ThMn12 crystal structure is retained and the lattice parameters increase to a=8.67 and c=4.862 Å, corresponding to a volume expansion of 3.6%. The coercivity also increases upon nitrogenation.