Large scale two-step selective aluminum CVD on laser patterned palladium lines
- 1 May 1994
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 79-80, 381-384
- https://doi.org/10.1016/0169-4332(94)90440-5
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- High-speed laser direct writing of tungsten conductors from W(CO)6Applied Physics Letters, 1990
- Laser direct-write metallization in thin palladium acetate filmsJournal of Applied Physics, 1987
- Patterned aluminum growth via excimer laser activated metalorganic chemical vapor depositionApplied Physics Letters, 1986
- Patterned photonucleation of chemical vapor deposition of Al by UV-laser photodepositionApplied Physics Letters, 1984