Abstract
An ion-neutral species collision model with charge exchange is developed for use in particle simulation of a glow discharge based on an extension of the theory of Langevin (1905) and Hasse (1926). The validity of the model is checked by Monte Carlo calculation of drift velocity for He+-He, Ne+-Ne, Ar+-Ar and Kr+-Kr collisions. The results show good agreement with the experimental data and the solution by the moment method, especially for heavy gases. By proper choice of the cut-off value of the dimensionless impact parameter in the model, it is applicable to a collision of ions of energy 1 keV.
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