Graphoepitaxy of Spherical Domain Block Copolymer Films

• 6 August 2001
• journal article
• research article
• Published by Wiley in Advanced Materials
• Vol. 13  (15) , 1152-1155
• https://doi.org/10.1002/1521-4095(200108)13:15<1152::aid-adma1152>3.0.co;2-5

Abstract

Keywords

• BLOCK COPOLYMERS
• GRAPHOEPITAXY
• LITHOGRAPHY
• THIN FILMS