A High Performance Submicrometer CMOS/SOI Technology Using Ultrathin Silicon Films on Simox

Publisher Website

1 January 1987

journal article
Published by Springer Nature in MRS Proceedings

Vol. 107
https://doi.org/10.1557/proc-107-349

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Subthreshold slope of thin-film SOI MOSFET's
IEEE Electron Device Letters, 1986
High-voltage CMOS SIMOX technology and its application to a BSH-LSI
IEEE Transactions on Electron Devices, 1986