Combined AFM and laser lithography on hydrogen-passivated amorphous silicon

• 31 December 1996
• journal article
• Published by Elsevier in Superlattices and Microstructures
• Vol. 20  (4) , 555-560
• https://doi.org/10.1006/spmi.1996.0114

Abstract

Keywords

• SILICON
• COMBINED AFM
• HYDROGEN PASSIVATED
• LASER LITHOGRAPHY
• AMORPHOUS
• AFM AND LASER