Low pressure RF discharge in electronegative gases for plasma processing
- 1 May 1993
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 200 (3) , 309-314
- https://doi.org/10.1016/0022-3115(93)90301-e
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- RF discharge modeling considering time dependence and spatial nonlocality of the electron energy spectrumIEEE Transactions on Plasma Science, 1991
- Numerical model of rf glow dischargesPhysical Review A, 1987
- Monte-Carlo simulation of electron properties in rf parallel plate capacitively coupled dischargesJournal of Applied Physics, 1983