Plasma anodization of GaAs in a dc discharge

• 1 July 1978
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 15  (4) , 1525-1529
• https://doi.org/10.1116/1.569781

Abstract

Keywords

• DC DISCHARGE
• GAAS IN A DC
• PLASMA ANODIZATION OF GAAS