RHEED analysis of interface growth modes of TiN films on Si(001) produced by crossed beam laser ablation
- 1 May 1998
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 127-129, 105-110
- https://doi.org/10.1016/s0169-4332(97)00618-1
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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