An optically-addressed silicon strain sensor
- 2 January 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 16 (1-2) , 135-140
- https://doi.org/10.1016/0250-6874(89)80012-5
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Etched silicon vibrating sensorJournal of Physics E: Scientific Instruments, 1984
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Optical fiber sensor technologyIEEE Journal of Quantum Electronics, 1982