Simplified method for analyzing nanoindentation data and evaluating performance of nanoindentation instruments

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Abstract
Nanoindentation is a simple and effective means for evaluating the mechanical properties of thin films. In such circumstances, nanoindentation testers have been developed and commercialized by some companies. In this study, we tested the standard four specimens using six different types of testers and established a method to evaluate the nanoindentation data. The method requires only two correction factors; one is the frame compliance, Cf, of the testers, and the other is the error of the detection of the original surface which includes both the truncation of the indenter apex and the damage of the surface caused by the preloading of the indenter. The latter correction is conducted by adding a correction length, ΔhC, to the measured penetration depth, h. It was found that the values ΔhC increase with decrease in the hardness of material and are very sensitive to the performance of the testers.