Formations of TiN and TiC in titanium coated stainless steel by heat treatment

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Abstract
Titanium coated stainless steel prepared by magnetron sputtering was heated from 600 to 1000 °C in a vacuum with pressure less than 10−6 Pa in order to modify the surface structure. The change of the surface state was analyzed by Auger electron spectroscopy and x-ray photoelectron spectroscopy (XPS). From the depth profile, it was observed that carbon and nitrogen atoms from the stainless steel considerably diffused into the film. The XPS analysis showed the formations of TiC and TiN in the film region at the heating temperature of 800 and 1000 °C, respectively. In particular, TiN was formed in the thick surface region. For stainless steels with various contents of carbon and nitrogen, the dependence of the contents on the formation of TiC and TiN was examined. The microhardnesses of the samples were measured by a Knoop hardness tester. The dominant formation of TiN was observed in the sample with high nitrogen content. The hardness of the sample with lower nitrogen (0.029%) and higher carbon (0.078%) contents was highest (2900±500 kG/mm2), approximately five times greater than that of the uncoated stainless-steel sample. Thermal desorption processes of gases in the titanium coated stainless steels with the modified surface was also investigated, and the result showed that desorptions of H2, CH4, and N2 were very suppressed by the surface modification.

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