On the design and characterization of a novel arsine cracking furnace utilizing catalytic decomposition of AsH3 to yield a purely monomeric source of arsenic for molecular beam epitaxial growth of GaAs
- 1 April 1984
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 2 (2) , 280-284
- https://doi.org/10.1116/1.582805