The use of a silicon carbide porous plug for the control of gas flow into a vacuum system down to 1 l torr sec-1
- 1 April 1966
- journal article
- Published by IOP Publishing in Journal of Scientific Instruments
- Vol. 43 (4) , 229-233
- https://doi.org/10.1088/0950-7671/43/4/305
Abstract
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