Silicon micromachined hollow microneedles for transdermal liquid transfer
- 25 June 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Influence of the angle between etched (near) Si{ 111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of siliconJournal of Micromechanics and Microengineering, 2001
- Microfabricated Polysilicon Microneedles for Minimally Invasive Biomedical DevicesBiomedical Microdevices, 2000
- Microfabrication of cantilever styli for the atomic force microscopeJournal of Vacuum Science & Technology A, 1990