Application of Radio-Frequency Discharged Plasma Produced in Closed Magnetic Neutral Line for Plasma Processing

1 January 1994

journal article
Published by IOP Publishing in Japanese Journal of Applied Physics

Vol. 33 (1A) , L43-44
https://doi.org/10.1143/jjap.33.l43

Abstract

A new plasma processing method is presented. Use of plasma produced in a closed magnetic neutral line is essential and the merit is easily illustrated in principle with a preliminary experimental result. This method is considered to be useful for many kinds of plasma processing.

Keywords

SPUTTERING
ASHING
ETCHING
PLASMA PROCESSING
RADIO FREQUENCY

This publication has 1 reference indexed in Scilit:

Demonstration of high-frequency induction heating of plasma located in a closed null-field line
Nuclear Fusion, 1972