Sputtering of titanium carbide coatings under D+ and 4He+ ion bombardment: Total sputter yields and angular distribution
- 1 September 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 83 (1) , 107-114
- https://doi.org/10.1016/0040-6090(81)90592-7
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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