Fabrication Method for Surface Gratings Using a Faraday Cage in a Conventional Plasma Etching Apparatus
- 1 January 1999
- journal article
- Published by The Electrochemical Society in Electrochemical and Solid-State Letters
- Vol. 2 (3) , 129
- https://doi.org/10.1149/1.1390757
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: