The role of polymer deposited in differential dielectric etch

• 1 May 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 14  (3) , 1092-1095
• https://doi.org/10.1116/1.580274

Abstract

Keywords

• DIFFERENTIAL DIELECTRIC
• POLYMER DEPOSITED
• DIELECTRIC ETCH
• ROLE OF POLYMER