Lateral force curve for atomic force/lateral force microscope calibration
- 23 January 1995
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 66 (4) , 526-528
- https://doi.org/10.1063/1.114078
Abstract
In this letter, a method to calibrate sensitivity for the three‐dimensional displacement of X, Y, and Z directions by using the novel force curve, namely lateral force curve, as well as vertical force curve in atomic force/lateral force microscope (AFM/LFM) measurement is described. Furthermore, from quantized friction measurement based on the two‐dimensional stick–slip model, it is experimentally confirmed that this lateral force curve calibration is reasonable.Keywords
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