Integrated-optic interferometric microdisplacement sensor in glass with thermo-optic phase modulation
- 19 July 1990
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 26 (15) , 1144-1145
- https://doi.org/10.1049/el:19900740
Abstract
A compact and stable integrated-optic Michelson-interferometer for 0.633 μm wavelength operation with ion exchanged waveguides in glass is demonstrated for optical displacement measurement. The integration of thermo-optic modulators allows the combined detection of fast movement with orthogonal signals, and high-resolution (1 nm) displacement detection with optical heterodyning.Keywords
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