Shrinkage and annihilation of stacking faults in silicon

• 1 January 1977
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 14  (1) , 44-46
• https://doi.org/10.1116/1.569260

Abstract

Keywords

• SHRINKAGE AND ANNIHILATION
• ANNIHILATION OF STACKING
• STACKING FAULTS IN SILICON