Micro capillaries array head for direct drawing of fine patterns

Abstract
Free-space micro ink streams are realized using an array of micro capillaries. Ink is ejected from capillaries accelerated by an electric field with low or no back pressure applied. The capillaries are 20 /spl mu/m in diameter, whereas the micro streams are only a few micrometers thick due to the Taylor cone effect. This method enables one to draw very fine lines without lithographical techniques. By applying an AC field, dotted lines can also be drawn. Direct drawing of both solid and dotted lines have successfully been demonstrated by applying DC and 500 Hz AC fields, respectively.

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