A New Device Structure And Process Flow For A Low Leakage Pin-diode-based Integrated Detector Array
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. IIB_7-0_29
- https://doi.org/10.1109/drc.1991.664680
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
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- Fabrication of detectors and transistors on high-resistivity siliconNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1989
- An IC-compatible detector processIEEE Transactions on Nuclear Science, 1989