Extraction performance of dual-grid ion optics: Simulation and experiment

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Abstract
A comprehensive comparison between experimental and simulated data for the ion beam characteristics of a two-grid extraction system is presented. An existing description for dc ion sources has been generalized and extended to capacitively coupled rf ion sources. The essential parameter in dc technology—the discharge voltage—was replaced by the plasma edge potential used also by simulation, allowing direct correlation between experimental and simulated data. Experimental results show 50% higher divergence angles if a part of the ion trajectories impinges on the accelerator grid. The reasons for this discrepancy are analyzed. Simple empirical formulas are proposed which describe the performance of the beamlet formed by one hole of a multiaperture extraction optic for a wide range of working conditions. These formulas permit better modeling of the broad beam and optimization of ion optics.

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