Dimethylamine Inhibits the Reaction of Tetrakis(dimethylamido)titanium with Ammonia: Implications for the Chemical Vapor Deposition of TiN and Other Nitrides
- 1 September 1995
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 7 (9) , 1609-1611
- https://doi.org/10.1021/cm00057a005
Abstract
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